出版日期：2021-12-23 00:00:00

著者：J. Zhu; H Xin; C Zheng; Tzong-Ru Tsai

著錄名稱、卷期、頁數：Mathematics 10(1), p.35

摘要：The process performance index (PPI) can be a simple metric to connect the conforming rate of products. The properties of the PPI have been well studied for the normal distribution and other widely used lifetime distributions, such as the Weibull, Gamma, and Pareto distributions. Assume that the quality characteristic of product follows power-normal distribution. Statistical inference procedures for the PPI are established. The maximum likelihood estimation method for the model parameters and PPI is investigated and the exact Fisher information matrix is derived. We discuss the drawbacks of using the exact Fisher information matrix to obtain the confidence interval of the model parameters. The parametric bootstrap percentile and bootstrap bias-corrected percentile methods are proposed to obtain approximate confidence intervals for the model parameters and PPI. Monte Carlo simulations are conducted to evaluate the performance of the proposed methods. One example about the flow width of the resist in the hard-bake process is used for illustration.

關鍵字：bootstrap methods;maximum likelihood estimation;Monte Carlo simulation;process performance index;power-normal distribution;quality control

語言：en_US

ISSN：2227-7390

期刊性質：國外

收錄於：SCI Scopus

審稿制度：否

國別：CHE

出版型式：電子版