出版日期：2025-11-18 00:00:00

著者：Lung-Jieh Yang; De-Yu Jiang; Wei-Chen Wang; Chandrashekhar Tasupalli; Horng-Yuan Shih; Yi-Jen Wang

著錄名稱、卷期、頁數：Micromachines 16(11) ,p.1290

摘要：This study presents the development of a capacitive pressure sensor tailored for measuring the dynamic pressure of flow fields. The sensor is fabricated using the UMC 0.18 µm CMOS-MEMS process, incorporated with additional post-processing steps such as metal wet etching, supercritical CO2 drying, and parylene encapsulation. The sensing architecture employs AD7746 as a capacitance-to-voltage converter (CVC), enabling the conversion of capacitance signals into voltage outputs for enhanced measurement fidelity. Structurally, the capacitive pressure sensor features a vacuum-sealed diaphragm capsule design with dual movable circular membranes functioning as sensing electrodes. A contact-mode capacitive configuration with a trapezoidal or Gong-like vacuum-chamber diaphragm is adopted to improve linearity and sensitivity. The output sensitivity was determined to be feasible for measuring dynamic pressure at 1–2 Pa resolution.

關鍵字：capacitive pressure sensor;complementary metal oxide semiconductor (CMOS);vacuum chamber

語言：en

ISSN：2072-666X

期刊性質：國外

收錄於：SCI Scopus

通訊作者：Lung-Jieh Yang

審稿制度：是

國別：CHE

出版型式：電子版